OPTIcoat ST32 - Spin Coating
Product Information
The future technology in the semiconductor industry and production-
Stand-Alone Spin Coating System "Covered Chuck" and Hotplate within process:OPTIcoat ST 32
- Stand - Alone Spin Coating System with "Covered Chuck"
technology with Hotplate for Wafers up to Ø 12" (Ø 300 mm)
and substrates up to 9" x 9" (225 mm x 225 mm), for traditional
open bowl or covered chuck spinning
System consists of:- Stand - Alone cabinet with all process modules integrated
- Spinner system with "Covered Chuck" technology and automatic substrate pin lift
- Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
- Hotplate OPTIhot HB 30 with lifting pins for 4" up to 12"
- Input display unit with touch for spin coater
- Temperature controller and timer for hotplate
- Including software for PC / Notebook - For more comfortable
recipe writing and storage - Including an ENGLISH manual on standard paper and a CD-ROM
- Price without installation and training
- Requires at least one chuck (Not included !)
Technical Data:- Voltage: UAC= 3 x 400 V / N/PE/50 Hz (60Hz)/16A
- Motor-Speed: 1 up to 6,000rpm in 1rpm steps
- Motor-Acceleration ramp: 1 up to 3,000 rpm/sec in steps 1rpm/sec
- Substrate size: Up to Ø 12" (Ø 300 mm) or 9" x 9" (225 mm x 225 mm)
- Process bowl: Standard made of Polypropylene (PP)
- Process exhaust: With outer diameter Ø 110 mm, 650m3/h
- Cabinet exhaust #1: Outer diameter Ø 110 mm, 40m3/h
- Cabinet / HP exhaust #2: Outer diameter Ø 110 mm, 40m3/h
- Drain: Standard 5 liter PEHD waste tank with high-level sensor
- Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
- Vacuum: -0.8 ± 0.2 bar
- Nitrogen (N2) Optional: 4.0 ± 0.5 bar
- CE marked system
Hotplate:- Temperature range: Up to 300°C - Adjustable in 0.1°C steps
- Hotplate time: 1 up to 999 s - Adjustable in 0.1 s steps
- Proximity: Programmable in 0.1 mm steps
- For Wafer: Up to Ø 12" (Ø 300 mm)
- For Substrate: Up to 9" x 9" (225 mm x 225 mm)
- Lifting pins: For Ø 4" up to Ø 12"
Chuck: Option
Dispense: Option
Nozzle: OptionHotplate: Option
- Stand - Alone Spin Coating System with "Covered Chuck"