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OPTIcoat ST60 - Spin Coating

OPTIcoat ST60 - Spin Coating

  • Product Information

    The future technology in the semi conductor industry and production-
    Coating System with a process optimized covered chuck technology:

    OPTIcoat ST 60

    • Stand - Alone Spin Coating System with "Covered Chuck"
      technology for Wafers up to Ø 22" (Ø 560 mm) and substrates
      up to 16" x 16" (400 mm x 400 mm) for covered chuck spinning 

    System consists of:

    • Stand - Alone cabinet with all process modules integrated
    • Spinner System with Covered Chuck technology and automatic substrate pin lift
    • Multi piece process bowl with splash ring
    • Input display unit with touch for each system
    • Including software for PC / Notebook - For more comfortable recipe writing and storage
    • Including an ENGLISH manual on standard paper and a CD-ROM
    • Price without installation and training
    • Requires at least one chuck (Not included !)

    Technical data:

    • Voltage: UAC= 3 x 400 V / N / PE /50 Hz (60 Hz) / 16A
    • Motor speed: 1 up to 2,500 rpm - Adjustable in 1 rpm steps (depends on substrate weight and size)
    • Motor acceleration ramp: 1 up to 500 rpm/s - Adjustable in 1 rpm/s steps (depends on substrate / chuck weight and size)
    • Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
    • Substrate size: Up to Ø 22" (Ø 560 mm) or 16" x 16" (400 mm x 400 mm)
    • Process bowl: Standard made of Polypropylene (PP)
    • Process exhaust#1: Outer diameter OD 110 mm, 200m3/h
    • Process exhaust#2+3: Outer diameter OD 110 mm, each 200m3/h
    • Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
    • Controller exhaust: Outer diameter OD 110 mm, 200m3/h
    • Drain: 5 liter waste tank and high-level sensor
    • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
    • Vacuum: -0.8 ± 0.2 bar
    • Nitrogen (N2) Optional: 4.0 ± 0.5 bar
    • CE marked system

This is a customizable product with a very large amount of options available. Please contact our sales department for more information and support to get a product customized to your needs.

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