OPTIcoat ST60 - Spin Coating

The future technology in the semi conductor industry and production-
Coating System with a process optimized covered chuck technology:

OPTIcoat ST 60

• Stand - Alone Spin Coating System with "Covered Chuck"
  technology for Wafers up to Ø 22" (Ø 560 mm) and substrates
  up to 16" x 16" (400 mm x 400 mm) for covered chuck spinning 

System consists of:

• Stand - Alone cabinet with all process modules integrated
• Spinner System with Covered Chuck technology and automatic substrate pin lift
• Multi piece process bowl with splash ring
• Input display unit with touch for each system
• Including software for PC / Notebook - For more comfortable recipe writing and storage
• Including an ENGLISH manual on standard paper and a CD-ROM
• Price without installation and training
• Requires at least one chuck (Not included !)
  
  

Technical data:

• Voltage: UAC= 3 x 400 V / N / PE /50 Hz (60 Hz) / 16A
• Motor speed: 1 up to 2,500 rpm - Adjustable in 1 rpm steps (depends on substrate weight and size)
• Motor acceleration ramp: 1 up to 500 rpm/s - Adjustable in 1 rpm/s steps (depends on substrate / chuck weight and size)
• Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
• Substrate size: Up to Ø 22" (Ø 560 mm) or 16" x 16" (400 mm x 400 mm)
• Process bowl: Standard made of Polypropylene (PP)
• Process exhaust#1: Outer diameter OD 110 mm, 200m3/h
• Process exhaust#2+3: Outer diameter OD 110 mm, each 200m3/h
• Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
• Controller exhaust: Outer diameter OD 110 mm, 200m3/h
• Drain: 5 liter waste tank and high-level sensor
• Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
• Vacuum: -0.8 ± 0.2 bar
• Nitrogen (N2) Optional: 4.0 ± 0.5 bar
• CE marked system